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CN: DemoJournal-CN
ISSN: DemoJournal-ISSN
Research Article Archive • Versions 1 Vol 3 (1) : 20030102 2020
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Metrology Challenges in 3D NAND Flash Technical Development and Manufacturing
Wei Zhang, Jun Xu, Sicong Wang, Yi Zhou, Jian Mihidden
Received： 2019 - 10 - 07
Published： 2020 - 03 - 30
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Journal of Microelectronic Manufacturing

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